FEMTOGRAM MASS DETECTION USING DYNAMIC MODE OPERATION – BASED MICROCANTILEVER
Keywords:
microcantilever, mass detection, femtogram, resonance frequency shiftAbstract
In this work, we present a detection of femtogram mass (water vapour and gas) using dynamic mode operation-based microcantilever. In the detection of water vapour (humidity), the result shows that the resonance frequency of microcantilever decreases about 10 Hz when the humidity increases from 30% RH to 35% RH. Such resonance frequency shift corresponds to water molecules mass of 59 fg attached on microcantilever surface. For gas detection, gas molecules of about 910 fg is detected by SnO2 sensitive layer-coated microcantilever. Such results open up the possibility of femtogram mass detection using developed microcantilever system.
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Copyright (c) 2023 Ratno Nuryadi, Lia Aprilia, Djoko Hartanto
This work is licensed under a Creative Commons Attribution 4.0 International License.
